| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a polymer for resists which permits ready and stable recovery of the polymer containing a small amount of residual monomers and solvents as a powder. <P>SOLUTION: The manufacturing method of the polymer for resists comprises solution-polymerizing monomers to be converted into constituting units of the aimed polymer by the polymerization in a solvent to obtain a solution containing the aimed polymer, and mixing a solvent for reprecipitation with the solution containing the polymer so that the SP value of the whole solvent falls within the range of 30-35 [MPa<SP>1/2</SP>] thereby to cause the polymer to deposit. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
