| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection apparatus and a surface inspection method capable of detecting the state of defects in the surface of matter in detail. SOLUTION: In the surface inspection apparatus and the surface inspection method for inspecting a surface to be inspected 40 on the basis of the intensity of reflected light when irradiating light irradiated to the surface to be inspected 40 is reflected, an optical fiber 41 and a diffusing plate 42 irradiate the surface to be inspected 40 with the irradiating light having a light intensity distribution more intense to the side of the surface to be inspected 40, and a CCD sensor 44 detects the intensity of reflected light when the irradiating light is reflected by the surface to be inspected 40. COPYRIGHT: (C)2006,JPO&NCIPI
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