| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction device for reliably sucking and trapping contaminants released from a contaminant releasing source. SOLUTION: The suction device comprises a hood body 1 having a cylindrical inner wall therein and four injectors mounted at almost equal spaces near the lower end of the inner wall. Air in the hood is sucked and exhausted by a sucking and exhausting device connected to an exhaust pipe 2 and part of the sucked air is supplied to an air supply pipe 6 via a second sucking and exhausting device connected to an exhaust pipe 3 and then supplied to the four ejectors through an annular body 7. Air is blown from the four ejectors along the inner wall in the same circumferential direction to produce a rising and swirling air current in the hood which reliably sucks and traps the contaminants from the releasing source located at the lower part of the hood into the hood. COPYRIGHT: (C)2006,JPO&NCIPI
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