FLUORINE-CONTAINING COPOLYMER, METHOD FOR PRODUCING SAME AND RESIST COMPOSITION CONTAINING SAME

摘要

Disclosed is a fluorine-containing copolymer having a unit derived from a monomer unit formed by ring-forming polymerization of a fluorine-containing diene represented by the formula (1) below, and a unit derived from a monomer unit formed by ring-forming polymerization of a functional group-containing fluorine-containing diene having a specific structure or a monomer unit formed by polymerization of an acrylic monomer having a specific structure. Also disclosed are a method for producing such a fluorine-containing copolymer and a resist composition containing such a fluorine-containing polymer. CF2=CFCH2CH(C(CF3)2(OR<3>))CH2CR<1>=CHR<2> (1) In the formula (1), R<1> and R<2> independently represent a hydrogen atom or an alkyl group having not more than 12 carbon atoms; R<3> represents a hydrogen atom, an alkyl group having not more than 20 carbon atoms, an alkoxycarbonyl group having not more than 15 carbon atoms or CH2R<4> (wherein R<4> represents an alkoxycarbonyl group having not more than 15 carbon atoms); and a part of or all of the hydrogen atoms in the alkyl group, alkoxycarbonyl group or R<4> constituting R<3> may be substituted with fluorine atoms and the alkyl group, alkoxycarbonyl group or R<4> constituting R<3> may have an ether oxygen atom.