ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF CONTROLLING DOOR,申请号KR20030050188-传众专利搜索

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发明名称	ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF CONTROLLING DOOR
摘要
申请公布号	KR100529668(B1)	申请公布日期	2005.11.17
申请号	KR20030050188	申请日期	2003.07.22
申请人		发明人
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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