| 摘要 |
PROBLEM TO BE SOLVED: To solve problems in a charged particle beam device that conventionally position adjustment of a gas supplying part is complicated, there are variations in precision of positioning depending on a device user, and furthermore that in carrying out working of a sample accompanied with gas supply by using a contactable probe, there is a possibility of interference of the gas supply part and the probe, and workability is inferior. SOLUTION: In the charged particle beam device, the probe capable of contacting with the gas supply part and the sample surface is mounted on the common transportation means. By carrying out adjustment of the position of the gas supply part by the probe, the adjustment of the position becomes easier, and variations of the positions are eliminated. By this, in working of the sample accompanied with the gas supply, shortening of the working hours and improvement of workability are contributed. As for the probe as well, there becomes no contact with the gas supply part, and the workability is improved. COPYRIGHT: (C)2006,JPO&NCIPI
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