发明名称 Electrical Testing Facility
摘要 Electrical test arrangement, especially for testing wafers, has a contact head with an arrangement of pin-type contact elements for connecting to a test item. The arrangement has a central centering arrangement (20) with sliding guides (22) for central alignment of the contact head (6) relative to its contact device (7) such that only radial heat-expansion play is provided.
申请公布号 EP1596204(A1) 申请公布日期 2005.11.16
申请号 EP20050008317 申请日期 2005.04.15
申请人 FEINMETALL GMBH 发明人 BOEHM, GUNTHER
分类号 G01R31/26;G01R1/073;G01R1/44;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址