Heating resistor film, recording head substrate, recording head, and recording apparatus

摘要

To provide a heating resistor film having a sufficiently high durability to repetitive pulse applications, a recording head substrate including the heating resistor film, a recording head, and a recording apparatus. A heating resistor film that generates heat energy using currents flowing from a wire in a heat acting portion of a recording head substrate, is made of amorphous tantalum silicon nitride having a sheet resistance of 200 Omega/□ to 400 Omega/□, and has a thickness of 30 nm to 80 nm.