发明名称 Fiber embedded polishing pad
摘要 A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The loose fibers define and the precursors were mixed first with curatives, then mold into a pad form. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers.
申请公布号 US6964604(B2) 申请公布日期 2005.11.15
申请号 US20040816882 申请日期 2004.04.05
申请人 发明人
分类号 B24B37/04;B24D3/28;B24D11/00;B24D13/12;B24D13/14;B24D18/00;(IPC1-7):B24D11/00 主分类号 B24B37/04
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