| 摘要 |
A ceramic gad sensor comprises an upper electrode, a reaction layer, a lower electrode, and a ceramic cavity layer. The reaction layer is a ceramic substrate with one end provided with a reaction region that has a plurality of duct holes penetrating through the upper and lower surfaces of the substrate and a reaction film covering the upper surface of the reaction region. The reaction film is made of a detecting material and connected to the duct holes. There is also the detecting material provided inside the duct holes. The upper electrode is attached on the reaction film. The lower electrode is attached on the lower surface of the substrate and connected to the duct holes. The ceramic cavity layer is provided on the lower surface of the reaction layer with the lower electrode in between.
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