发明名称 |
SYSTEM AND METHOD FOR USING FIRST-PRINCIPLES SIMULATION TO FACILITATE A SEMICONDUCTOR MANUFACTURING PROCESS |
摘要 |
A method, system and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is then performed using the input data and the physical model to provide a first principles simulation result, and the first principles simulation result is used to facilitate the process performed by the semiconductor processing tool. |
申请公布号 |
WO2005036591(A3) |
申请公布日期 |
2005.11.10 |
申请号 |
WO2004US16618 |
申请日期 |
2004.06.16 |
申请人 |
TOKYO ELECTRON LIMITED;MITROVIC, ANDREJ, S. |
发明人 |
MITROVIC, ANDREJ, S. |
分类号 |
G06F19/00;H01L |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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