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发明名称
Strahlungsempfindliche Polymerzusammensetzung
摘要
申请公布号
DE69827429(T2)
申请公布日期
2005.11.10
申请号
DE19986027429T
申请日期
1998.05.15
申请人
TORAY INDUSTRIES, INC.
发明人
YUBA, TOMOYUKI;ISHIKAWA, YOSHIHIRO;ASANO, MASAYA
分类号
C08G73/10;G03F7/037;G03F7/038;(IPC1-7):G03F7/038
主分类号
C08G73/10
代理机构
代理人
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