| 摘要 |
PROBLEM TO BE SOLVED: To provide a shearing interferometer or the like capable of measuring the surface shape, eccentricity or the like of an optical element stably and highly accurately regardless of a peripheral environment. SOLUTION: This interferometer has a laser light source 111, a light flux splitting part 115 for splitting a light flux from the laser light source 111 into the first light flux and the second light flux, and an image rotator 116 for rotating the light flux at a prescribed angle relative to an optical axis AX. The interferometer also has a light flux synthesizing part 115 for synthesizing the first light flux and the second light flux rotating at a prescribed angle in the opposite directions respectively, an imaging optical system 118 for imaging the synthesized light fluxes, and a CCD camera 119 for taking an interference fringe. The light flux rotation part 116 allows the first light flux and the second light flux to enter from the opposite directions respectively, and rotates the first light flux and the second light flux at the prescribed angle in the opposite directions respectively, and the function of the light flux splitting part 115 and the function of the light flux synthesizing part 115 are used in common by the same beam splitter 115. COPYRIGHT: (C)2006,JPO&NCIPI
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