| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar battery element having little warping and a good output characteristic by suppressing internal stress and damages suffered by the solar battery element due to heating at the time of burning the electrodes. <P>SOLUTION: The solar battery element comprises conductivity type semiconductor substrate having the opposite conductivity type diffusion region on the front surface side, a surface electrode formed on the front surface side of the semiconductor substrate, and a rear electrode which consists of a collector electrode and an output extraction electrode and is formed on the rear surface side of the semiconductor substrate. The method of manufacturing the solar battery element includes a burning process wherein an electrode material applied to the semiconductor substrate is burned to form the surface electrode and/or rear electrode. The burning process comprises a first burning process of burning the semiconductor substrate in a nearly horizontal position, and a second burning process of burning the semiconductor substrate after it is rotated about 180°with the vertical direction as an axis from the direction of burning in the first burning process. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
