发明名称 |
HIGHLY PURIFIED LIQUID PERFLUORO-N-ALKANES AND METHOD FOR PREPARING |
摘要 |
The present invention is drawn to liquid perfluoro-n-alkanes that are highly transparent to UV wavelengths ranging from about 150 nm to 165 nm, and to the method by which high transparency may be obtained. The liquid perfluoro-n-alkanes of the invention are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography at 157 nm exposure wavelength |
申请公布号 |
WO2005087693(A3) |
申请公布日期 |
2005.11.10 |
申请号 |
WO2005US07933 |
申请日期 |
2005.03.08 |
申请人 |
E.I. DUPONT DE NEMOURS AND COMPANY;WHELAND, CLAYTON, ROBERT;FRENCH, ROGER, HARQUAIL |
发明人 |
WHELAND, CLAYTON, ROBERT;FRENCH, ROGER, HARQUAIL |
分类号 |
C07C17/389;C07C19/08;G03F7/20 |
主分类号 |
C07C17/389 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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