发明名称 PATTERN TRANSFER METHOD
摘要 <p>Disclosed is a pattern transfer method comprising a first step wherein a desired pattern is transferred to a resin layer (30) which is formed on a substrate (10) via a release layer (20); a following second step wherein the pattern having been transferred to the resin layer (30) is then transferred to the substrate (10) and a part of the release layer (20) is exposed; and a following third step wherein the release layer (20) between the substrate (10) and the resin layer (30) is removed by being dissolved through the exposed part.</p>
申请公布号 WO2005106931(A1) 申请公布日期 2005.11.10
申请号 WO2005JP07709 申请日期 2005.04.22
申请人 NIKON CORPORATION;IKUGATA, TOSHIO;MIYAKAWA, AKIKO 发明人 IKUGATA, TOSHIO;MIYAKAWA, AKIKO
分类号 B81C1/00;C03C15/00;G02B5/18;G03F7/00;H01J9/24;H01L21/027;(IPC1-7):H01L21/027 主分类号 B81C1/00
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