| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet coating device which enhances the stability of ink discharge and the coating reliability, and has the installing area of the device reduced, while suppressing pressure fluctuation in a coating head as much as possible. SOLUTION: In this inkjet coating device coating the surface of a substrate by spraying a solution, since the coating head can be moved at a uniform speed by providing a first moving means 6 linearly moving the substrate in a fixed direction, a second moving means 7 stacked on the first moving means 6 and moving the substrate in a direction orthogonal to the moving direction of the first moving means 6, a coating means 11 arranged perpendicularly to the surface of the substrate and discharging ink onto the surface of the substrate, and a third moving means 14 moving the coating means parallel to either moving direction of the first or the second moving means 6, 7 and moving at a uniform speed, the stable coating can be performed without receiving inertia force acting on ink. COPYRIGHT: (C)2006,JPO&NCIPI |
