| 摘要 |
A microinjection apparatus includes a substrate having holes for trapping cells using suction force and injecting a substance into the cells with a needle. Height detection marks are provided on the substrate. A visibility is calculated from an image of a height detection mark, and an amount of deformation of the substrate is determined from the visibility. An XYZ table, on which the substrate is placed, is moved based on the amount of deformation.
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