| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus and an exposure method that can reduce distortion of an image to be drawn on a recording medium by detecting meandering caused by movement of a stage. <P>SOLUTION: As the exposure stage wobbles accompanied by its movement to generate displacement, distortion is induced in an image transferred onto a recording medium by exposure. To avoid the problem, distortion in an image transferred onto a recording medium by exposure is corrected by imaging markings by a CCD camera at each imaging timing to detect the displacement in the direction intersecting with the moving direction of the recording stage by meandering with respect to the stage plane, and carrying out an image shift process. The image shift process is carried out by reading out the adjacent image regions from the storage memory of divided images and adding the acquired data to the both ends of the image data in each head assembly, shifting the entire image with the adjacent images added according to the displacement caused by meandering, and trimming the shifted image at the connecting-line position to produce the image data for exposure to be performed by the head assembly. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
