发明名称 |
Device for holding a beam splitter element |
摘要 |
The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
|
申请公布号 |
US2005248858(A1) |
申请公布日期 |
2005.11.10 |
申请号 |
US20050109316 |
申请日期 |
2005.04.19 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
WEBER ULRICH;KOHL ALEXANDER;HOLDERER HUBERT;SCHOEPPACH ARMIN;GABER ERWIN;KAISER WINFRIED;GARREIS REINER;GRUNER TORALF;REED CHRIS;PARIZA DRAGOS;MEEHAN MIKE |
分类号 |
G02B7/00;G02B7/18;G03F7/20;(IPC1-7):G02B5/30;G02B27/28;G02B7/02 |
主分类号 |
G02B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|