| 摘要 |
PROBLEM TO BE SOLVED: To prevent distortion, deformation, and damage from occurring on a heat-treated object by heat treatment in a heat treatment apparatus. SOLUTION: An induction heating heater having induction heating heaters H1, H2, ... which are sequentially opposed to substrates P arranged along a carrying passage 11C in a furnace body 11 and having independently controllable heating temperatures and opposed to any substrate carried by the roller conveyor. The heating temperatures of the induction heating heater and the induction heating heater to which the substrate is opposed next when the substrate is carried by the roller conveyor are controlled, in order, in synchronism with the carrying of the substrates so that the induction heating heaters are heated to the same heating temperature. COPYRIGHT: (C)2006,JPO&NCIPI
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