MICROFLUIDIC DEVICE WITH THIN-FILM ELECTRONIC DEVICES

摘要

A microfluidic device (90) for analysis of a sample. The microfluidic device includes a substrate portion (94) that at least partially defines a chamber (102) for receiving the sample. The substrate portion (94) includes a substrate (98) having a surface (96). The substrate portion (94) also includes a plurality of thin-film layers (110) formed on the substrate (98) adjacent the surface (96). The thin-film layers (110) form a plurality of electronic devices. Each of at least two of the electronic devices is formed by a different set of the thin-film layers (110). The at least two electronic devices may include 1) a temperature control device for controlling the temperature of fluid in the chamber (102), and 2) an other electronic device configured to sense or modify a property of fluid in the chamber (102).