Wafer loader preventing damage of wafer,申请号KR19990030515-传众专利搜索

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发明名称	Wafer loader preventing damage of wafer
摘要
申请公布号	KR100527352(B1)	申请公布日期	2005.11.09
申请号	KR19990030515	申请日期	1999.07.27
申请人		发明人
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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