发明名称 HEAT TREATMENT SYSTEM
摘要 <p>A heat treatment system in which the direction of a magnetic field being generated by a field generating means (20) in a region for heat treating an object is in parallel with the direction of the object being carried into a heat treatment vessel (2) by a carrying means (10) and in parallel with the horizontal direction of the entire heat treatment system, wherein the object is heat treated while being arranged such that the major surface thereof becomes parallel with the direction of the magnetic field being generated by the field generating mans (20) in the heat treatment region. The heat treatment system employs a compact solenoid type magnet (air core coil) in order to simplify the structure of the field generating means. Consequently, the weight and height of the system can be saved without varying the installation area substantially. The heat treatment system can be installed in an ordinary clean room and can treat a large quantity of larger objects as compared with prior art. <IMAGE></p>
申请公布号 EP1594145(A1) 申请公布日期 2005.11.09
申请号 EP20040708855 申请日期 2004.02.06
申请人 FUTEK FURNACE INC. 发明人 UENO, HIROTO
分类号 C21D1/04;H01F41/18;C21D9/00;F27B5/04;F27B5/12;F27B5/13;F27B5/14;F27B14/08;F27B14/14;F27B14/16;F27D3/12;G11B5/39;H01F41/22;H01L21/00;H01L43/08;H01L43/12;(IPC1-7):H01F41/18 主分类号 C21D1/04
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