| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating stage, capable of heating products to be heated such as a wafer or the like to an elevated temperature, and preventing contamination of the products to be heated due to the generation of impurities during heating. SOLUTION: The heating stage is provided with a flat stage portion for laying the products to be heated after the stage portion, a glass component containing a body in which housed is a plurality of lamps as heating means; a body portion and a bottom portion; and a metal component constituting an internal volume which is united with the glass component and is in a pressure reduced state and is filled with an inert gas. COPYRIGHT: (C)2006,JPO&NCIPI
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