| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical semiconductor device having a window lid, in which the quality is enhanced and the manufacturing cost is reduced, by improving the window lid. <P>SOLUTION: A DMD body 102 is mounted in a recess 101a in the upper surface of a ceramic substrate 101, and a window lid 103 is fixed onto the substrate 101 and seam welded to close the recess 101a, thus hermetically sealing the interior 104. The window lid 103 consists of a frame member 106, formed by drawing a thin plate material, and a glass plate member 120. The frame member 106 has a top plate portion 108 provided with an opening window 107, a peripheral side plate portion 109, and a flange portion 110. The glass plate member 120 is fitted in a space 111, from the underside of the frame member 106 and is welded to the lower surface 108a of the top plate portion 108 and the inner surface 109a of the peripheral side plate portion 109 by matched type welding. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
