| 摘要 |
PROBLEM TO BE SOLVED: To provide a fixture for wafer junction which can be used safely and simply without requiring huge facility or the like. SOLUTION: When laminating wafers together, the wafer junction fixture comprises an upper holder 10 and a lower holder 20 sandwiching coupling wafers in up-and-down direction. Furthermore, it comprises a mechanism 30 arranged between the upper holder 10 and the lower holder 20, and for maintaining the pressurization adherence state of a wafer 40 held in between the upper holder 10 and the lower holder 20 with a desired pressure applied thereto in a direction to bring the wafer 40 in close contact. COPYRIGHT: (C)2006,JPO&NCIPI |
