摘要 |
PROBLEM TO BE SOLVED: To provide a phosphor inspection device capable of fully inspecting a coating state of phosphor to be coated on a substrate. SOLUTION: In the phosphor inspection device irradiating ultraviolet rays emitted from a low-pressure mercury lamp on the phosphor by reflecting it by a reflector and condensing it, and inspecting a coating state of the phosphor by imaging with a CCD camera a light-emitting state of the phosphor by the irradiation of the ultraviolet rays, a reflecting mirror 22Aa of the reflector 22A is provided with a shape of a concave side of an elliptic arc with a center angleθof less than 180°. COPYRIGHT: (C)2006,JPO&NCIPI
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