| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid-sealed semiconductor pressure sensor having excellent pressure resisting performance. SOLUTION: In this pressure sensor, a fluid is enclosed in a liquid-sealed chamber formed by an interior space of a pressure detecting element in which a semiconductor sensor chip is stored and a diaphragm, and a pressure applied from the outside is transmitted to the semiconductor sensor chip through the fluid of the liquid-sealed chamber to output an electric signal according to the pressure. At least a part of a vertical section leading to a through hole 32 from an outer circumferential part 33 of a lid member 31 in which a through hole 32 formed in the bottom is connected to a pressure introducing pipe 41 introducing the pressure from the outside and a welded part 63 along the outer circumference is connected to a pressure detecting element 21 is formed in L-shape. Thereby, a force to the rotating direction around the welded part 63 when the fluid is introduced into the interior space of the lid member 31 from the pressure introducing pipe 41 and the fluid pressure acts on the inner surface of the lid member 31 is reduced, and the fracture of the welded part 63 is prevented. COPYRIGHT: (C)2006,JPO&NCIPI
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