| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a fine mechanical element which includes a sacrificial layer having a structure such that its horizontal thickness and its vertical thickness are accurately set to individual values, and achieves both a fine-pitched structure after releasing and expansion of a movable stroke; and to form the sacrificial layer in the recesses of a substrate so as to have a thick layer on a bottom of each recess but a thin and uniform layer on each side surface of the recess. SOLUTION: There is provided a fine mechanical element manufacturing method, according to which the sacrificial layer is formed in the following two steps, i.e. in the first step, a first sacrificial layer 2 is formed on the bottom of the recess 1a, and in the second step, a second sacrificial layer 3 is formed on the other surfaces and on the first sacrificial layer so as to have a uniform thickness. Thus the thicknesses of the sacrificial layers formed in the respective steps are individually set to values t<SB>1</SB>and t<SB>2</SB>. COPYRIGHT: (C)2006,JPO&NCIPI
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