| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology of improving the resonance characteristics of a minute resonator, by suppressing the effect of parasitic capacitance in the minute resonator. SOLUTION: The minute resonator is configured to include an input electrode which receives a frequency signal; a beam electrode vibrated by the frequency signal received by the input electrode; a resonance circuit section 13, including an output electrode for outputting a signal, in response to the vibration frequency of the beam electrode; and an inductor 14 connected in parallel with the resonance circuit section 13. COPYRIGHT: (C)2006,JPO&NCIPI
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