| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid supplying device which realizes the improvement of discharging precision of a chemical liquid by using a tank capable of accommodating the chemical liquid without damaging the purity of the chemical liquid. SOLUTION: The flexible tank 20 has a volume variable chamber 29 which is divided and formed by a flexible tube 28a expanding and shrinking according to an amount of the chemical liquid accommodated, and adapter parts 27a, 27b mounted with the flexible tube 28a. The adapter part 27a is opened by a primary port 21 opening to the volume variable chamber 29, and the adapter part 27b is opened by a secondary port 22 opening to the volume variable chamber 29. The chemical liquid can be accommodated without damaging its purity, and the discharging precision is improved by suppressing the contact of the chemical liquid with air in the volume variable chamber 29 to a minimum. COPYRIGHT: (C)2006,JPO&NCIPI
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