| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a soft X-ray multilayered film reflection mirror capable of attaining high reflectance in a soft X-ray area. <P>SOLUTION: In this X-ray multilayered film reflection mirror layered alternately on a substrate 1 with layers (high refractive index layer 5) comprising a material having a large difference between a refractive index in the soft X-ray area and a refractive index under vacuum, and layers (low refractive index layer 4) comprising a material having a small difference between the refractive index and the refractive index under vacuum, at least one or more of intermediate layers 3 having crystal structure are inserted between the low refractive index layer 4 and the high refractive index layer 5, the crystallization of the low refractive index layer 4 is promoted therein, and the refractive index is reduced thereby to enhance the reflectance of the multilayered film reflection mirror. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
