| 摘要 |
A method for manufacturing, by utilizing a punch and a die, a cell driving type actuator wherein a plurality of piezoelectric/electrostrictive elements are arranged in alignment like the teeth of a comb on a base plate. Each cell is formed by closing two adjacent piezoelectric/electrostrictive elements disposed on the base plate with a cover plate positioned at a plane facing the base plate in such a manner that the cell is formed independently from its adjacent cells. The method includes the steps of preparing a plurality of green sheets made of piezoelectric/electrostrictive material, machining slit apertures in all of the green sheets with the punch, and laminating all of the green sheets after positioning them, thus forming comb-like piezoelectric/electrostrictive elements.
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