发明名称 |
IMPROVED ADDRESSING OF AN SLM |
摘要 |
<p>The present invention relates to a method to reduce charging effects affecting a degree of movement of at least one movable micro mirror in a spatial light modulator, said at least one movable micro mirror is electrostatically attractable to at least one electrode, including the action of attracting electrostatically said at least one micro mirror in a sequence of reversed electrical field between said micro mirror and said at least one electrode.</p> |
申请公布号 |
WO2005103776(A1) |
申请公布日期 |
2005.11.03 |
申请号 |
WO2005SE00570 |
申请日期 |
2005.04.20 |
申请人 |
MICRONIC LASER SYSTEMS AB;LJUNGBLAD, ULRIC;DUERR, PETER |
发明人 |
LJUNGBLAD, ULRIC;DUERR, PETER |
分类号 |
G02B6/12;G02B26/02;G02B26/08;G02F1/01;G02F1/29;(IPC1-7):G02B6/12 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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