Pressure sensor involves semi-conductor substrate in which aperture is etched, which extends from substrate under side to capacitive measurement device on upper side

摘要

The pressure sensor involves a semi-conductor substrate (1) in which an aperture (4) is etched, which extends from the substrate upper side (2) to a capacitive measurement device (6-12) on the upper side (3). The under side is closed by a glass plate (5) anodically connected with the substrate, thus forming a simply producible lasting closure. The electrodes (7,11) of the measurement device are integrated on the upper side of the substrate and can thus be simply produced. The aperture in the substrate forms a closed cavity with defined reference pressure. A hollow space (13) between the electrodes is connected with a measurement space (15).