发明名称 TFT ARRAY SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To improve manufacturing yield of a TFT array substrate by improving anti-static electricity characteristic of semiconductor wiring in the TFT array substrate. SOLUTION: The TFT array substrate is provided with: many gate wires 11L formed of the first metal layer; many source wires 15L formed of the second metal layer and allocated crossing the gate wires 11L; a TFT 105 including a TFT semiconductor 14T formed of a semiconductor layer; semiconductor wire 14L formed of the semiconductor layer, allocated under the source wires 15L and is extended along the source wires 15L; and a semiconductor coupling part 14J formed of the semiconductor layer to couple these semiconductor wires 14L. This semiconductor coupling part 14J is formed as a series of semiconductor patterns together with the semiconductor wire 14L to be coupled. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005302818(A) 申请公布日期 2005.10.27
申请号 JP20040113075 申请日期 2004.04.07
申请人 MITSUBISHI ELECTRIC CORP 发明人 NOMI SHIGEAKI;MASUTANI YUICHI;NAGANO SHINGO
分类号 G02F1/1343;G02F1/1368;H01L21/3205;H01L23/52;H01L29/786;(IPC1-7):H01L29/786;H01L21/320;G02F1/136;G02F1/134 主分类号 G02F1/1343
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