摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical modulator, capable of realizing reliable push-pull operation by constructing layers which can be formed by a general crystal growth technology. SOLUTION: In the semiconductor optical modulator, provided with an optical waveguide comprising a semiconductor core layer for transmitting light and an electrode for applying electrical signals to the semiconductor core layer on a semiconductor substrate, the semiconductor core layer consists of an intrinsic semiconductor or a semiconductor layer at least one part of which is an n type, a first n-type semiconductor layer is provided on the lower side of the semiconductor core layer, a second p-type semiconductor layer is provided on the upper side of the semiconductor core layer and doping structure of the optical waveguide is made a p-i-p structure. COPYRIGHT: (C)2006,JPO&NCIPI |