PULSED LASER PROCESSING WITH CONTROLLED THERMAL AND PHYSICAL ALTERATIONS

摘要

Laser machining of material using a burst of ultrashort laser pulses, tailoring the pulse width, pulse separation duration, wavelength, and polarization to maximize the positive effect of thermal and physical changes achieved by the previous pulse on the laser-matter interaction. Manipulations of pulse width, pulse separation duration, and pulse energies of pulses within a burst can be used to achieve better processing results. Wavelength and polarization of a laser beam may be varied pulse-to-pulse in a burst in order to produce maximum laser-matter interaction.