| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for making ultrapure water capable of enhancing the water quality of the ultrapure water by controlling a sodium ion in a non-regenerative ion exchange resin used in an apparatus for making the ultrapure water, particularly in a cation exchange resin, to suppress the sodium ion flowing out from the ion exchange resin to treated water at an extremely low level and an apparatus, and a method and an apparatus for cleaning electronic components and members using the same. SOLUTION: The method and the apparatus for making the ultrapure water are characterized in that in the non-regenerative ion exchange resin used for the apparatus for making the ultrapure water, the cation exchange resin has a fraction of a sodium type compound R-Na of≤0.01%, preferably≤0.001%, and the method and the apparatus for cleaning the electronic components and members such as a wafer and the like using the same. COPYRIGHT: (C)2006,JPO&NCIPI
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