| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shunt-type flow sensor, capable of securing high accuracy and confidence of measurement using a thermal flow sensor connected to a substrate by wire bonding. <P>SOLUTION: The shunt-type flow sensor is provided with a main flow path and a by-pass flow path. In the by-pass flow path the thermal flow sensor 211 is provided. The main flow path module 11 for forming the main flow path provided with an opening on its side, and the by-pass modules 12, 21 for closing the opening of the main flow path module 11 are provided, wherein the main flow path module 11 is provided with a straightening means 14 at the upstream of the entrance 121 of the by-pass flow path module. The by-pass flow path module 12, 21 are provided with the substrate 21 which is electrically connected with the thermal flow sensor 211 by the wire bonding, and the wall of the by-pass flow path at the vicinity of the thermal flow sensor 211 is constituted of an insulation body. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
