| 摘要 |
PROBLEM TO BE SOLVED: To improve operability of spherical aberration coefficient C<SB>S</SB>correction by easily correcting a deflection component accompanying generation of three astigmatic component, a two astigmatic component and four astigmatic component, and therefore, very easily operating spherical aberration coefficient C<SB>S</SB>correction. SOLUTION: A power source control part 26 generates correction signals for correcting the deflection component, the two astigmatic component, and the four astigmatic component as other components, accompanying generation of the three astigmatic component due to a first and a second correction pieces 21, 22 based on the three astigmatic component generated by the first and the second correction pieces 21, 22. The power source control part 26 then supplies the correction signals generated to the first and the second correction pieces 21, 22 to have them correct the other components. As a matter of course, the first and the second correction pieces 21, 22 also correct spherical aberration of an irradiation system, with the use of the aberration generated by themselves, as well as the first correction piece 21. COPYRIGHT: (C)2006,JPO&NCIPI
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