| 摘要 |
<P>PROBLEM TO BE SOLVED: To assure an uniformity of a surface treatment by reducing an amount of bending by a coulomb force of an electrode in a plasma treatment device for a large area treatment object. <P>SOLUTION: An electrode structure 30X of the plasma treatment device consists of a pair of electrode rows 31X, 32X extending side by side and facing back and forth each other. Each electrode row is structured with a plurality of electrode members 31A to 32C put in order side by side, a gap 33p between rows having inverse polarities respectively between electrode members of an electrode row and the other electrode row arranged at the same position in a right and left direction substantially is formed between mutual facing surfaces. Furthermore, the polarity of electrode members to be adjacent with each other in each electrode row is mutually reversed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
