发明名称 Image sensor having notch filter and method for fabricating the same
摘要 Disclosed are an image sensor and a method for fabricating the same. The method includes the steps of: forming a plurality of photodiodes on a substrate; forming an insulation layer on the plurality of photodiodes; alternatively depositing an oxide layer and a nitride layer plural times on the insulation layer; forming a plurality of notch filters for blocking a green light by alternatively stacking the oxide layer and the nitride layer in a plurality of color filter regions of red and blue after selectively removing the oxide layer and the nitride layer stacked alternatively in the green color filter region; forming a planarization layer on the plurality of notch filters; and forming a plurality blue, green and red color filters on the plurality of notch filters.
申请公布号 US2005236653(A1) 申请公布日期 2005.10.27
申请号 US20050073344 申请日期 2005.03.04
申请人 LIM YOUN-SUB 发明人 LIM YOUN-SUB
分类号 G02B5/20;H01L21/00;H01L27/146;H01L31/0216;H01L31/062;H01L31/10;H04N5/335;(IPC1-7):H01L21/00 主分类号 G02B5/20
代理机构 代理人
主权项
地址