| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermoelectric gas sensor, made into a microelement, particularly an inexpensive contact combustion type micro gas sensor, capable of identifying the gas kind from a combustible mixed gas, using a simple structure. SOLUTION: This micro thermoelectric gas sensor comprises a thermoelectric conversion part, a microheater, a catalyst layer formed on the microheater and heated by the microheater, the catalyst layer working as a catalyst catalytically burning a combustible gas, and a sensor part including an electrode pattern therefor, which are formed on the membrane of a predetermined thickness. According to this, power consumption can be reduced, and high sensitivity concentration measurement and high-speed response can be attained. COPYRIGHT: (C)2006,JPO&NCIPI
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