APPARATUS AND METHOD FOR MANUFACTURING FERRITE FILM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a ferrite film comprising an aggregate of homogeneous columnar crystals so as to eliminate conventional drawbacks in a ferrite film formed by a ferrite plating method and to increase industrial productivity. SOLUTION: The apparatus is equipped with: a nozzle 1 to bring a reaction liquid containing ferrous ions into contact with a substrate 7; a nozzle 2 to bring an oxidizing medium containing an oxidizing agent or oxygen into contact with the substrate 7; a ultrasonic hone 8 to uniformly disperse the reaction liquid and the oxidizing medium; a feeding roll 4 to continuously feed the substrate 7 and a winding roll 5; and a pump 3 to circulate the reaction liquid and the oxidizing medium to remove a residue from the substrate, the residue not contributing to the formation of a ferrite film in the reaction liquid and the oxidizing medium. COPYRIGHT: (C)2006,JPO&NCIPI