| 摘要 |
A semiconductor-device characteristic measurement apparatus includes first measuring means for measuring a first electrical characteristic of a device under test, second measuring means, switching means for switching between the first measuring means and the second measuring means such that one of the measuring means is connected to the device under test, and controlling means for controlling the switching means. The switching means includes switches that switch between a first wiring configuration for electrically connecting the first measuring means to the device under test and a second wiring configuration for electrically connecting the second measuring means to the device under test. The switching means is electrically connected to the device under test at a position closer to the device under test than the first measuring means and the second measuring means.
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