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发明名称
POINT DIFFRACTION INTERFEROMETER COMPRISING AUTOMATIC COLLIMATOR
摘要
申请公布号
KR20050102264(A)
申请公布日期
2005.10.26
申请号
KR20040027447
申请日期
2004.04.21
申请人
KOREA ELECTRO TECHNOLOGY RESEARCH INSTITUTE
发明人
LEE, KYOUNG HEE;VOZNESENSKY NIKOLAYB.;KIRILLOVSKY VLADIMIR K.
分类号
G01N21/45;(IPC1-7):G01N21/45
主分类号
G01N21/45
代理机构
代理人
主权项
地址
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