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发明名称
Substrate Holder and Device Manufacturing Method
摘要
申请公布号
KR100523824(B1)
申请公布日期
2005.10.25
申请号
KR20030046506
申请日期
2003.07.09
申请人
发明人
分类号
G03F7/20;H01L21/027;H01L21/683;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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