发明名称 Ceramic heaters
摘要 An object of the present invention is to provide a ceramic heater so that hot spots around the end portions of a heat resistor may be prevented. A ceramic heater has a ceramic substrate having a mounting face for an object to be heated, a heat resistor 3 B embedded in the substrate and having end portions 3 a, and a connecting member 6 electrically connected with the end portion 3 a. At least one connecting member 6 substantially has an outer shape of a sphere, an ellipsoid of revolution, or a cylinder. The connecting member 6 has a fixing portion 3 a of the heat resistor by means of caulking.
申请公布号 US6958462(B2) 申请公布日期 2005.10.25
申请号 US20030386002 申请日期 2003.03.11
申请人 NGK INSULATORS, LTD. 发明人 UNNO YUTAKA;NOBORI KAZUHIRO
分类号 H05B3/20;H01L21/00;H01L21/02;H01L21/205;H01L21/687;H05B3/06;H05B3/18;H05B3/74;(IPC1-7):H05B3/68 主分类号 H05B3/20
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